The EH 2000 is equipped with a hollow cathode for filamentless operation and a water-cooled anode as standard. Unlike ‘first generation’ sources, power, gas and water lines are connected to the side of the source body. This greatly simplifies installation and maintenance.
- High output 2.5A of Ion Beam Current
- Long life Hollow Cathode
- Water-cooled anode
- Rugged, reliable design for production
- Shielded insulators
- Simple installation and maintenance
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