EH 400 Gridless Ion Source - Ion Beam Scientific


	EH 400
		Technical Data
		Controller

	EH 1000

	EH 2000

This latest source design offers new standards of reliability and performance in R&D and Production use, with a four-fold increase in beam current over the ‘first generation’ ion sources. Maintenance procedures have also been simplified to promote low operational costs.

3.5A anode current
Slip-on connections
Rugged connectors
0.015" diameter filament
Quick-change cathode
1.4 Kg weight

EH 400 Dimensions
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EH 400 vs First Generation Ion Source

	EH 400	First Generation Ion Source
Anode Current	3.5 Amps	1 Amps
Beam Current	875mA @ 3.5A	200mA @1A
Anode Voltage	300 Volts max.	170 Volts max.
Beam Energy	40-210eV	50-120eV
Divergence	60°	60°
Height	3.0"	5.5"
Gas Flow	1-20sccm	5-20sccm
Pressure	1x10^-3 to 5x10^-5 Torr	1x10^-4 to 5x10^-4 Torr
Installed Height	3.0"	6.5"
Diameter	3.7"	2.5"

EH 400 vs Veeco-Commonwealth 3cm

	EH 400	3cm
Anode Current	2 Amps	3 Amps
Beam Current	400mA max. @ 2A	200mA max. @1200V
Anode Voltage	300 Volts max.	1200 Volts max.
Beam Energy	210eV	1200eV
Divergence	60°	15°
Installed Height	3.0"	4.0"
Diameter	3.7"	2.85"
Gas Flow	1-20sccm	1-10sccm
Pressure	1x10^-3 to 5x10^-5 Torr	1x10^-3 to 4x10^-4 Torr

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